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NEW DESIGN FOR HOTWALL REACTION CHAMBERS

IP.com Disclosure Number: IPCOM000007212D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2002-Mar-05

Publishing Venue

Motorola

Related People

Authors:
Emmett Howard Rose Peterman

Abstract

The length of the reaction chamber relative to the heating element is critical to maximize film uni- formity and minimize particulate levels in the reac- tion chamber.