Browse Prior Art Database

MULTI-LAYER CAPACITOR

IP.com Disclosure Number: IPCOM000007227D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2002-Mar-06
Document File: 1 page(s) / 47K

Publishing Venue

Motorola

Related People

Authors:
Yeo-Hwan Yang Shu-Wu Chiu Dan Lamey

Abstract

A novel approach to integrate MonoSolicon Capacitor (MSC) and Double Poly Capacitor (DPC) processes to achieve capacitance up to 3.1 ff/urn2 is proposed. Higher capacitance may be possible with thinner dielectric thickness.