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A method for wafer calibration performed in a stepper and coat/developer track linked interface.

IP.com Disclosure Number: IPCOM000007311D
Publication Date: 2002-Mar-13
Document File: 4 page(s) / 81K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for wafer calibration performed in a stepper and coat/developer track linked interface using a newly developed alignment fixture. Benefits include improved performance, reduced defects, and reduced product loss.