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METHOD OF PROCESSING HIGH PRECISION PRESSURE SENSORS

IP.com Disclosure Number: IPCOM000007318D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2002-Mar-14

Publishing Venue

Motorola

Related People

Authors:
Uko Udofia Karen Bartholomew Bruce Parmelee

Abstract

In piezoresistive pressure sensors, control ofpres- sure sensitivity has posed a tough technical chal- lenge since it is inversely proportional to the square of the diaphragm thickness. This makes the control of diaphragm thickness very critical to achieving high precision pressure sensors.