METHOD OF PROCESSING HIGH PRECISION PRESSURE SENSORS
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2002-Mar-14
In piezoresistive pressure sensors, control ofpres- sure sensitivity has posed a tough technical chal- lenge since it is inversely proportional to the square of the diaphragm thickness. This makes the control of diaphragm thickness very critical to achieving high precision pressure sensors.