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A RECHARGING METHOD IN CRYSTAL GROWTH

IP.com Disclosure Number: IPCOM000007334D
Original Publication Date: 1995-Mar-01
Included in the Prior Art Database: 2002-Mar-15
Document File: 4 page(s) / 132K

Publishing Venue

Motorola

Related People

Authors:
Herng-Der Chiou

Abstract

The feed stock used for a conventional recharging process in Czochralski (Cz) silicon crystal growth process is Siemens Chunk polysilicon or Ethyl par- ticulate polysilicon. The conventional recharging method requires an internal or external feed tube or hopper to feed the poly (silicon) into the remaining melt aher pulling a single crystal out. This article describes a new method which using a poly (crys- talline) crystal attached to a single crystal seed as a feed stock. Therefore, no internal or external feed tube or hopper is required in performing the recharging process.