Browse Prior Art Database

IMPROVED WAFER LIFT BLADE

IP.com Disclosure Number: IPCOM000007335D
Original Publication Date: 1995-Mar-01
Included in the Prior Art Database: 2002-Mar-15
Document File: 1 page(s) / 54K

Publishing Venue

Motorola

Related People

Authors:
Harry Flitter

Abstract

Existing SF1 lift blades run on SS bearing guide wheels. The blades run through the wheels and then through the boat ofwafers, lilting one up the chuck for deposition. This produces particles on the lift blade, which then collects a wafer for loading and comes in proximity to the waters waiting in the boat. Regular cleaning is scheduled to combat the partic- ulate problem, but alignment problems are offen a side effect.