IMPROVED WAFER LIFT BLADE
Original Publication Date: 1995-Mar-01
Included in the Prior Art Database: 2002-Mar-15
Existing SF1 lift blades run on SS bearing guide wheels. The blades run through the wheels and then through the boat ofwafers, lilting one up the chuck for deposition. This produces particles on the lift blade, which then collects a wafer for loading and comes in proximity to the waters waiting in the boat. Regular cleaning is scheduled to combat the partic- ulate problem, but alignment problems are offen a side effect.