PSMLint - Phase Shifting Mask Physical Verification Level Type Checking
Publication Date: 2002-Mar-18
The IP.com Prior Art Database
A phase shifting mask type checking approach, PSMlint, is described. The approach can be integrated into physical verification and related tools and processes to provide early assessment and resolution of phase shifting problems. This helps facilitate so called phase compliant designs. The type checking can include both shape/geometry checking as well as coloring checking.