Browse Prior Art Database

PSMLint - Phase Shifting Mask Physical Verification Level Type Checking

IP.com Disclosure Number: IPCOM000007351D
Publication Date: 2002-Mar-18
Document File: 9 page(s) / 46K

Publishing Venue

The IP.com Prior Art Database

Abstract

A phase shifting mask type checking approach, PSMlint, is described. The approach can be integrated into physical verification and related tools and processes to provide early assessment and resolution of phase shifting problems. This helps facilitate so called phase compliant designs. The type checking can include both shape/geometry checking as well as coloring checking.