MICROMECHANICAL CHECK VALVE
Original Publication Date: 1995-Mar-01
Included in the Prior Art Database: 2002-Mar-21
The problem ofcontrolling fluid (gas and liquid) flow on a microscopic' scale is addressed. Applica- tions include controlling the flow of blood in small capillaries, and, membranes which are porous in only one direction. Several excellent articles have been written about the problem of manipulating fluids on a microscopic scale [l, 21. Due to the interest in ink jet printing technology, quite a bit of work has already been done on micromachining nozzles in silicon .