A METHOD FOR ASSEMBLING MICROMECHANICAL DEVICES USING ONE OF MAGNETIC FIELD OR LIQUID SURFACE TENSION
Original Publication Date: 1995-Jul-01
Included in the Prior Art Database: 2002-Mar-28
An ex-situ micromachine fabrication technol- ogy is taught herein which allows micromechanical/ micromachined parts of different materials to be fab- ricated singly (ex-situ) without the limitations in in-situ manufacturing and yet devices can be assem- bled into highly complex 3-D devices/structures. In other words, a micromachining structure which com- prises many parts (for example one or more of, gears, shafts, moving arms, micromachined motors, pinch- ers, grippers, propellers, fans, pipes, scissors, electri- cal circuitry, sensors, communication devices/cir- cuitry, transducers, a housing, III-V optical struc- tures and the like) can be assembled by first assem- bling the individual parts. These individual parts could even be manufactured on different substrates in different locations. Once the individual pieces are available, lilI-off etch techniques, magnetic alignment, and liquid surface tension can be used to assemble the parts in an "assembly line" ex-situ manner.