IMPROVED WAFER LIFT BLADE
Original Publication Date: 1995-Nov-01
Included in the Prior Art Database: 2002-Apr-03
Existing SF1 lit? blades run on SS bearing guide The lift blades in use are made of a mild steel. wheels. The blades run through the wheels and then This material in this application has high inertia through the boat of wafers, lifting one up the chuck and low stiffness. Blade wobble is ever-present and for deposition. This produces particles on the Iill the blades are always bent to some degree, causing blade, which then collects a wafer for loading and difficulty in the alignment procedures. Many times comes in proximity to the wafers waiting in the boat. a less than perfect alignment is the best that can be Regular cleaning is scheduled to combat the partic- done. ulate problem, but alignment problems are often a side effect.