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Non-critical Blocking for Full Phase Masks

IP.com Disclosure Number: IPCOM000007568D
Publication Date: 2002-Apr-05

Publishing Venue

The IP.com Prior Art Database


Phase assignments on a phase-shift mask can require feature definition with a corresponding binary mask, particularly in non-critical areas. Critical dimensions (CDs) can be preserved, even with substantial mask misplacement, by defining multiple feature edges with the binary mask in such non-critical areas.