InnovationQ will be updated on Sunday, September 22, from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

PSM Library and Place and Route

IP.com Disclosure Number: IPCOM000007571D
Publication Date: 2002-Apr-05

Publishing Venue

The IP.com Prior Art Database


An approach to laying out features in a layer of material in an IC designed for use with phase shifting masks (PSMs) is disclosed.