Compatibility of Si-gates for Metal-Oxide Dielectrics
Original Publication Date: 2002-Apr-10
Included in the Prior Art Database: 2002-Apr-10
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Poly-silicon compatibility issues with a metal-oxide dielectric is reported and methods to achieve better Si-gate/metal-oxide compatibility discussed. It can be generally stated that CVD silicon gates using silane (SiH4) deposited at conventional temperatures (620 °C) directly onto HfO2 resulted in films with very high leakage. However, depositing the CVD Si-gate at a lower temperature of 540 °C directly on HfO2 showed about 103 times reduction in gate leakage compared to the conventional 620 °C poly-Si/HfO2 of similar electrical thickness.