APPARATUS FOR SECURING WAFERS DURING THE GOLD EVAPORATION PROCESS
Original Publication Date: 1996-Aug-01
Included in the Prior Art Database: 2002-Apr-19
In order to eliminate thin (5 mils) wafer break- age due to shock forces and process vibration, this invention is based on the idea offloating wafers above the inner surrface of the domed holding fixture as opposed to clamping the wafers against its surface. This invention has the ability to absorb shock (caused by dropping the planets onto a flat surface) and proc- ess vibration (induced by planet rotations in the vac- uum chamber) by positioning each water within a protective shield assembly which is supported by a network of springs.