A METHOD OF MAKING ZENER DIODES AND ZENER TRIGGERED SCRs IN SUB-HALF MICRON TECHNOLOGY
Original Publication Date: 1996-Aug-01
Included in the Prior Art Database: 2002-Apr-22
Zener Diodes' have been commonly used for ESD protection circuits. Traditional Zener imple- mentation can cause severe leakage due to surface conditions. Consequently, the I/O circuits can be very leaky under normal operation conditions and products will not meet specs. New method of mak- ing low leakage current Zeners and Zener Triggered SCRs (they are shown in Figure 1 and 2, respec- tively) was proposed.