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Plane Shift Measurement Method Utilizing Z-Axis Coupled Structures

IP.com Disclosure Number: IPCOM000007810D
Publication Date: 2002-Apr-24
Document File: 2 page(s) / 30K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses broadside impedance structures to accurately measure layer registration and movement in packaging and PCB fabrication. Benefits include the ability to measure plane shift in a non-destructive way.