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Method for QTM for assembly induced ILD failures using blanket dielectric films

IP.com Disclosure Number: IPCOM000007829D
Publication Date: 2002-Apr-25
Document File: 4 page(s) / 101K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a quick-turn monitor (QTM) for assembly-induced inter-layer dielectric (ILD) failures using blanket dielectric films. Benefits include improved reliability.