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SURFACE TENSION MODIFICATION FOR EXHAUST SCRUBBERS

IP.com Disclosure Number: IPCOM000007836D
Original Publication Date: 1996-Aug-01
Included in the Prior Art Database: 2002-Apr-29

Publishing Venue

Motorola

Related People

Authors:
Charles D. Howell, P.E. Hsi-An Kwong, P.E.

Abstract

The exhaust from the acid exhaust scrubbers at semiconductor plants otlen contains ammonia salts as an emission. These salts are a byproduct of the chemicals used in the manufacture of semiconduc- tors. The salts create a visible emission (plume) Tom the exhaust stack.