SURFACE TENSION MODIFICATION FOR EXHAUST SCRUBBERS
Original Publication Date: 1996-Aug-01
Included in the Prior Art Database: 2002-Apr-29
The exhaust from the acid exhaust scrubbers at semiconductor plants otlen contains ammonia salts as an emission. These salts are a byproduct of the chemicals used in the manufacture of semiconduc- tors. The salts create a visible emission (plume) Tom the exhaust stack.