IN-LINE, POINT-OF-USE SLURRY FLOW DETECTION
Original Publication Date: 1997-Mar-01
Included in the Prior Art Database: 2002-May-13
In this work, we discuss the apparatus and installation plan required for in-line, point-of-use slurry flow detection for use with Chemical Mechanical Polishing tools; specifically, the IPEC Planar 472 Polisher. The apparatus and methodolo- gy presented herein is also applicable to both metal and oxide polishers from any of the recognized Suppliers of this type of tool.