THE ELIMINATION OF AMMONIUM CHLORIDE DEPOSITION IN A LPCVD FORELINE
Original Publication Date: 1997-Jun-01
Included in the Prior Art Database: 2002-May-23
In a LPCVD system a problem exists due to deposition of the by-product Ammonium Chloride on the unheated foreline surface. Pumping and vent- ing the foreline caused the deposit to backstream into the furnace tube, resulting in high infilm particle counts affecting uptime and MTBF.