MAGNETIC STIRRING BAR FOR EXTREMELY ABRASIVE, HARSH CHEMICAL ENVIRONMENTS
Original Publication Date: 1997-Sep-01
Included in the Prior Art Database: 2002-May-29
In this work, I discuss the apparatus required for stirring/agitating extremely abrasive, harsh chemicals used with Chemical Mechanical Polishing (CMP) tools. The apparatus and methodology presented herein is applicable to both metal and oxide slurries from any of the recognized Suppliers of this type chemistry.