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MAGNETIC STIRRING BAR FOR EXTREMELY ABRASIVE, HARSH CHEMICAL ENVIRONMENTS

IP.com Disclosure Number: IPCOM000008228D
Original Publication Date: 1997-Sep-01
Included in the Prior Art Database: 2002-May-29

Publishing Venue

Motorola

Related People

Authors:
James Vanell

Abstract

In this work, I discuss the apparatus required for stirring/agitating extremely abrasive, harsh chemicals used with Chemical Mechanical Polishing (CMP) tools. The apparatus and methodology presented herein is applicable to both metal and oxide slurries from any of the recognized Suppliers of this type chemistry.