Browse Prior Art Database

HYDRAULIC PAD CONDITIONING

IP.com Disclosure Number: IPCOM000008233D
Original Publication Date: 1997-Sep-01
Included in the Prior Art Database: 2002-May-29
Document File: 3 page(s) / 120K

Publishing Venue

Motorola

Related People

Authors:
Todd Buley James Vanell

Abstract

In this work., we review the current methods of pad conditioning used with Chemical Mechanical Polishing (CMP) tools and then describe hydraulic pad conditioning. The apparatus and methodology presented herein regarding hydraulic pad conditioning are applicable to all polishing tools from any of the recognized suppliers of this type of equipment.