Optimized Tool Location for Semiconductor Factories
Original Publication Date: 2002-Jun-04
Included in the Prior Art Database: 2002-Jun-04
Automated transport systems are often used in advanced semiconductor manufacturing factories (Fabs) to transport wafers to/from process tools and/or storage racks. While the initial cost of these systems are large, they are important for reducing overall operating costs since they speed up cycle time and reduce misprocessing. The use of overhead transportation (OHT) systems is especially useful in lowering operation costs of 300mm Fabs. The industry standard for 300mm processing equipment is to include one or more loadports where wafers can be lowered from an OHT system, automatically processed through the tool, then raised up to the OHT and moved to the next process tool.