4500I PADDLE ALIGNMENT TOOL
Original Publication Date: 1997-Dec-01
Included in the Prior Art Database: 2002-Jun-17
There has been a problem with Lam Research's 45001 Etcher burning the resist on wafers due to the improper height alignment of the heated paddle in the isotropic chamber. Lam Research used three plastic disk and a razor blade placed on one disk located underneath the paddle to set the alignment height which, depending on the person setting, was inconsistent. There was many inconsistencies in the procedure and the person doing the alignment which caused a high level of scrapped wafers due to burning resist and causing additional equipment down time.