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SYSTEM AND METHOD FOR GENERATING A TOPOGRAPHY MAP

IP.com Disclosure Number: IPCOM000008493D
Publication Date: 2002-Jun-18

Publishing Venue

The IP.com Prior Art Database

Related People

Inventors:
Andrei BRUNFELD Ilan LAVER Gregory TOKER Victor TSINKER
Other Related People:

Abstract

Apparatus for inspecting object including a scanner scanning a spot of illumination across a surface to be inspected, an optical system receiving a reflection of the spot and projecting it onto an array of sensors, and a height calculator calculating a height of the surface for a multiplicity of locations on the object, each calculation functionally related to a position of the spot on said array.