METHOD FOR FABRICATING LASER TUNABLE INTEGRATED COLOR MEMORY THIN FILM POTENTIOMETER
Original Publication Date: 1997-Dec-01
Included in the Prior Art Database: 2002-Jun-18
Tunable resistors are required for ICs and MMICs for such functions as feedback, isolation, self-biasing termination and voltage dividers in bias network. Conventional resistors in KS are fabricated by thermal diffusion, where the range of resistance are limited and also the accuracy with respect to designed values is less than desirable. The tempera- ture coefficient of resistance are difficult to compute because of the variation in doping density with depth. Ion implantation is used for higher values of resistance requiring better accuracy, and tolerance; this, however, requires significant capital invest- ment. We have developed an K-compatible method for fabricating a tunable thin film resistor.