SELF-ALIGNED LATE NOR-TYPE ROM PROGRAMMING UTILIZING LDD IMPLANT
Original Publication Date: 1998-Mar-01
Included in the Prior Art Database: 2002-Jun-21
Conventionally, the ROM (Read Only Memory) programming process is performed at the time when the active area of the NMOSFET (N-type Metal Oxide Silicon Field Effect Transistor) devices, which constitute the ROM, are being defined. Usually, the ROM would have completed 30% of the manufacturing process at that time. On the other hand, the late ROM programming technology will allow us to program the ROM after gate formation, when the products have completed 70% of the manufacturing process.