NEW CVD ALUMINUM METALLIZATION SCHEME FOR ULSI INTERCONNECT
Original Publication Date: 1998-Mar-01
Included in the Prior Art Database: 2002-Jun-21
The technique of inlaid metallization process has been actively pursued as an attractive replace- ment for the conventional metal deposition, patterning and etch process. The technology offers significant cost and cycle time reduction'-?. CVD Al is an excellent metallization materials because it offers excellent step coverage for high aspect ratio structures. Much work has been conducted on the nucleation of CVD Al on films such as TiN, TiNiTi, Cu etc, as well as the selective deposition of Al in vias or trenches'~! However, after much of detailed studies on very agressive dual inlaid structures, we found that 100% void-free metallized vias and trenches are not easily achievable on these nucleation layers. Unfortunately, Kelvin chain and via chain resistances are not sensitive to the presence of small voids.