HEATING EFFECT ADOPTION ON DIE COATING PROCESS
Original Publication Date: 1998-Mar-01
Included in the Prior Art Database: 2002-Jun-27
Silicone Coating of G-Cell(Sensing Die) is one of critical process in Accelerometer manufacturing. Silicone coating isolate the stress due to thermal mismatch between EMC(Epoxy Mold Compound) to prevent the sensitivity shifting. The full covering of die coat material is essential for device function but full coverage without overflow and coating 1st dispensing II thickness control is tough because of small flag area (base leadframe area under G-cell die).