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PROBE ALIGNMENT METHOD AND APPARATUS FOR USE IN PARAMETRIC TESTING

IP.com Disclosure Number: IPCOM000008783D
Original Publication Date: 1998-Sep-01
Included in the Prior Art Database: 2002-Jul-12

Publishing Venue

Motorola

Related People

Authors:
Stephen Traynor Phil Walker

Abstract

Initial set up of a batch of wafers for automatic probing is a manual process, in which the operator must establish a good electrical contact between the probe pins of a probe card and probe pads of the first wafer of the batch. This is achieved by careful- ly raising the wafer while aligning the bond pads onto the pins of the probe card.