PROBE ALIGNMENT METHOD AND APPARATUS FOR USE IN PARAMETRIC TESTING
Original Publication Date: 1998-Sep-01
Included in the Prior Art Database: 2002-Jul-12
Initial set up of a batch of wafers for automatic probing is a manual process, in which the operator must establish a good electrical contact between the probe pins of a probe card and probe pads of the first wafer of the batch. This is achieved by careful- ly raising the wafer while aligning the bond pads onto the pins of the probe card.