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USE OF STREAK CAMERA FOR PICOSECOND EMISSION MICROSCOPY AND APPLICATIONS FOR FAILURE ANALYSIS OF INTEGRATED CIRCUITS

IP.com Disclosure Number: IPCOM000008906D
Original Publication Date: 1999-Jan-01
Included in the Prior Art Database: 2002-Jul-23

Publishing Venue

Motorola

Related People

Authors:
Stefan Zollner

Abstract

The testing of CMOS circuits with high spatial and timing resolution can be achieved using picosecond emission microscopy based on a microchannel plate photomultiplier tube with a posi- tion-sensitive anode and time-correlated photon counting, but the time resolution is limited to about 10 GHz. The time resolution can be improved to about 1000 GHz through the use of a streak camera. If an infrared-sensitive streak camera (Sl spectral response or equivalent) is used, this may also reduce the need for backthinning the substrate of the circuit.