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Method for the use of a sol-gel derived porous cordierite as a low-k dielectric

IP.com Disclosure Number: IPCOM000009253D
Publication Date: 2002-Aug-13

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the use of a sol-gel derived porous cordierite (magnesium aluminum silicate) as a low dielectric-constant (k) dielectric. Benefits include improved performance and improved reliability.