Dismiss
InnovationQ will be updated on Sunday, September 22, from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Method for a process flow for fabricating transistors on both sides of the top wafer in a vertically stacked wafer system

IP.com Disclosure Number: IPCOM000009254D
Publication Date: 2002-Aug-13
Document File: 5 page(s) / 75K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a process flow for fabricating transistors on both sides of the top wafer in a vertically stacked wafer system. Benefits include improved functionality and improved performance.