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Method for the reduction of keff in semiconductor devices using a bilayer as the etch-stop layer Disclosure Number: IPCOM000009255D
Publication Date: 2002-Aug-13

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The Prior Art Database


Disclosed is a method for the reduction of the overall effective dielectric constant (keff) in semiconductor devices using separate materials to form the interface with Cu interconnects and act as the etch-stop (ES) layer. Benefits include improved performance and improved manufacturability.