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Browse Prior Art Database

NEW NON-CONTACT ROLLER TO REDUCE SCRATCHED DIE

IP.com Disclosure Number: IPCOM000009582D
Original Publication Date: 1999-Sep-01
Included in the Prior Art Database: 2002-Sep-04
Document File: 1 page(s) / 70K

Publishing Venue

Motorola

Related People

Authors:
Peter Yu L. J. Zhang Qun Zhang

Abstract

The non-contact roller is a new modified struc- ture of a wafer load roller. The conventional roller is to be changed to avoid the scratching dies during semi-conductor production. This non-contact roller significantly reduces the occurrence of scratches on dies and increases output.