NEW NON-CONTACT ROLLER TO REDUCE SCRATCHED DIE
Original Publication Date: 1999-Sep-01
Included in the Prior Art Database: 2002-Sep-04
The non-contact roller is a new modified struc- ture of a wafer load roller. The conventional roller is to be changed to avoid the scratching dies during semi-conductor production. This non-contact roller significantly reduces the occurrence of scratches on dies and increases output.