A METHOD TO FABRICATE MULTIPLE SEMICONDUCTOR FUNCTIONS ON ONE CHIP
Original Publication Date: 2000-Jan-01
Included in the Prior Art Database: 2002-Sep-09
It is a continuous trend that the IC industry is accelerating the degrees of integration to encompass multi-functional devices in one chip, or so called the system-on-a-chip. The integration of memory func- tion with logic function such as microprocessor has shown great successes. It is anticipated that making a computer in one Si chip can be realized in the near future.