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Automated Layout Correction for Full Feature Phase Shifting Mask (PSM)

IP.com Disclosure Number: IPCOM000010241D
Publication Date: 2002-Nov-11

Publishing Venue

The IP.com Prior Art Database

Abstract

A tool for checking and classifying possible errors in a layout to be phase shifted is described. By placing error markers in the layout, a phase shifting engine can be run more quickly and with fewer errors. In some instances, the markers may indicate that a region should be handled on the complementary mask rather than the phase shifting mask to alleviate problems.