Automated Layout Correction for Full Feature Phase Shifting Mask (PSM)
Publication Date: 2002-Nov-11
The IP.com Prior Art Database
A tool for checking and classifying possible errors in a layout to be phase shifted is described. By placing error markers in the layout, a phase shifting engine can be run more quickly and with fewer errors. In some instances, the markers may indicate that a region should be handled on the complementary mask rather than the phase shifting mask to alleviate problems.