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Adaptive Optical Proximity Correction (OPC) Dissection

IP.com Disclosure Number: IPCOM000010242D
Publication Date: 2002-Nov-11

Publishing Venue

The IP.com Prior Art Database

Abstract

The quality of optical proximity correction results, as well as all proximity corrections, for is heavily dependent on the dissection, or segmentation, of the layout. A method for adaptively dissecting layouts is proposed in which the OPC program, and/or a subsequent silicon-versus-layout verification tool, checks between evaluation points for large variances, aka ripples, and adjusts the segmentation, e.g. increases it, for those areas with large variances.