Tunable Inductor and Thin Film Resonator Filter with Adjustable Bandwidth
Original Publication Date: 2002-Nov-18
Included in the Prior Art Database: 2002-Nov-18
A multi-turn piezoelectric bimorph tunable inductor, in which part or parts of the inductor are suspended and can be manipulated by the application of DC voltages to vary their vertical position and hence turn spacing, hence coupling between turns, hence inductance. The tunable inductor can be monolithically integrated with a piezoelectric thin film bulk acoustic wave (BAW) resonator, since both are made with similar materials, for example aluminum electrodes and aluminum nitride piezoelectric layers. This electronic device that will be useful for many wireless communication devices requiring variable inductance, but especially in software definable radio (SDR) applications requiring reconfigurable electronics.