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SLM LIGHT INTENSITY REGULATOR

IP.com Disclosure Number: IPCOM000010300D
Publication Date: 2002-Nov-19

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The IP.com Prior Art Database

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Abstract

Homogenous light intensity is a key element in a lithographic patterning process. A spatial light modulator (SLM) can be used to homogenize intensity distribution in a beam spot used in a lithographic patterning process. A detector device detects the original intensity distribution and sends information to the SLM to adjust certain pixels in order to achieve a desired intensity pattern.