SLM LIGHT INTENSITY REGULATOR
Publication Date: 2002-Nov-19
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Homogenous light intensity is a key element in a lithographic patterning process. A spatial light modulator (SLM) can be used to homogenize intensity distribution in a beam spot used in a lithographic patterning process. A detector device detects the original intensity distribution and sends information to the SLM to adjust certain pixels in order to achieve a desired intensity pattern.