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Method for the use of piezoelectric actuators for hard pellicle positioning for 157-nm lithography

IP.com Disclosure Number: IPCOM000010739D
Publication Date: 2003-Jan-15

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the use of piezoelectric actuators (PAs) for hard pellicle positioning for 157-nm lithography. Benefits include improved functionality and improved design flexibility.