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Use of Sub-Ambient Temperatures to Improve Radiation Durability of Polymer-Based Pellicles

IP.com Disclosure Number: IPCOM000010800D
Publication Date: 2003-Jan-22

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that keeps the temperature of soft pellicles under the controlled sub-ambient temperature by purging sub-ambient nitrogen through the reticle chamber of the stepper. Benefits include an improvement in irradiation durability and stability.