InnovationQ will be updated on Sunday, September 22, from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Apparatus for Measuring Wafer Parallelism

IP.com Disclosure Number: IPCOM000011176D
Publication Date: 2003-Feb-12
Document File: 7 page(s) / 2M

Publishing Venue

The IP.com Prior Art Database


Disclosed is a method that consists of an optical inspection station for measuring wafer parallelism.