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Disclosed is a process for reducing flying height distribution by adjusting
air bearing surface curvature to compensate under- or over-milled air
bearing step heights of recording heads within a batch or in batch-to-
English (United States)
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An Integrated Process Control to Reduce Flying Height Distribution
Monte Carlo simulation on flying height with given air bearing step height distribution and surface curvature distribution of recording heads establishes a process recipe, how to minimize process control error for achieving minimum flying height variation. First, influences of air bearing surface curvature and step heights on flying height are formulated separately. Then, combine the results as error sources in flying height variation and finally find the condition for the minimum. Numerical equations to explain sensitivity of air bearing surface curvature and step heights on flying height follow. Take derivative of equations for air bearing surface curvature (crown) and step heights (IM depth and RIE depth)
Crown ID dfh = 0.1726 *dcrn
OD dfh = 0.2094 *dcrn AVG dfhc = 0.1910 *dcrn IM ID dfh = 106.1 *dim
OD dfh = 127.9 *dim AVG dfhi = 117.0 *dim RIE ID dfh = 2*12.394*rie*drie -34.763*drie
OD dfh = 2*13.002*rie*drie -46.219*drie AVG dfhr = 25.396 *rie*drie -40.491*drie 0 = dfhi + dfhr + dfhc < === equation to solve Solving for Crown as a function of IM and RIE to get an equation; dCrn = A*dRIE + B*RIE*dRIE + C*dIM
A B C ID dCrn = 201.408*dRIE -143.615*RIE*dRIE -614.716*dIM OD dCrn = 220.721*dRIE -124.183*RIE*dRIE -610.793*dIM AVG dCrn = 211.995*dRIE -132.963*RIE*dRIE -612.565*dIM Experimental result shows this method reduces overall flying height distribution by avg 21% and also reduces flying heigh...