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Dual Trench Scheme for Preventing Punch-Through and Cross Talk Between Devices

IP.com Disclosure Number: IPCOM000011625D
Original Publication Date: 2003-Mar-10
Included in the Prior Art Database: 2003-Mar-10

Publishing Venue

Motorola

Related People

Authors:
Ronghua Zhu Vijay Parthasarathy Vishnu Khemka Amitava Bose Todd Roggenbauer

Abstract

This publication proposes dual trench scheme in a deep trench isolated Smart Power Technology to prevent leakage, punch-through and cross-talk between devices.