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Method to Improve Integrated Diffused Resistor Voltage Linearity Using Dielectric Isolation

IP.com Disclosure Number: IPCOM000012186D
Original Publication Date: 2003-Apr-16
Included in the Prior Art Database: 2003-Apr-16

Publishing Venue

Motorola

Related People

Authors:
Vijay Parthasarathy Vishnu Khemka Ronghua Zhu Amitava Bose

Abstract

This publication proposes an innovation to improve the voltage coefficient of an isolated pwell resistor by isolating the sidewalls of the pwell with oxide inside a deep trench instead of a nwell diffusion.