A Voltage Variable, MEMS Capacitor Insensitive to Acceleration
Original Publication Date: 2003-May-28
Included in the Prior Art Database: 2003-May-28
A design for a MEMS (Micro Electronic Mechanical System) voltage variable capacitor is presented. This design uses a movable electrode that moves in rotation rather than translation, which greatly reduces the effect of translational acceleration on the proof mass. This would allow the use of voltage variable capacitors in products that could be subjected to acceleration, e.g. cell phones.