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A Voltage Variable, MEMS Capacitor Insensitive to Acceleration

IP.com Disclosure Number: IPCOM000012802D
Original Publication Date: 2003-May-28
Included in the Prior Art Database: 2003-May-28

Publishing Venue

Motorola

Related People

Authors:
Andrew McNeil

Abstract

A design for a MEMS (Micro Electronic Mechanical System) voltage variable capacitor is presented. This design uses a movable electrode that moves in rotation rather than translation, which greatly reduces the effect of translational acceleration on the proof mass. This would allow the use of voltage variable capacitors in products that could be subjected to acceleration, e.g. cell phones.