Route release with effective date and applicable product specified
Original Publication Date: 2002-Jun-01
Included in the Prior Art Database: 2003-Jun-12
Summary: Manufacturing plants of semiconductors are controlled by a manufacturing execution system (MES). Engineers define the route, which is a list of process steps including process conditions, manufacturing and metrology tool names, their recipe information and others at the build time operator interface of MES. The MES run-time is to instruct the operators or on-line controllers of the manufacturing tools and metrology tools based on the information defined at the MES build-time. This invention is the new way of changing MES run-time information when the build-time information changed. This function makes the MES system even flexible and useful. When the engineer defines a change in the process flow, he/she can define the product to which the change to be effective, or the effective date. In this way, The engineer can change the route information only the portion of the change required well ahead of the effective date. Detailed description: Bridge from Current to New Version of Main Process Flow When new version Main Process Flow is created and released to Run Time, no Work-in-process (WIP) lot refers the new version. Even if the new version is directed as Active version, it is selected as default Route for Order Releasing by Scheduling sub-system but WIP lots in shop floor don't refer it. If it's desired to make WIP lots change their routing from current version to new one, condition for changing route (bridge) needs to be specified as following.