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Method for Providing Multiple and Definable Current Source to a Plating Cathode and n-deflectors from a Single Current Source

IP.com Disclosure Number: IPCOM000013345D
Original Publication Date: 2000-Aug-01
Included in the Prior Art Database: 2003-Jun-18

Publishing Venue

IBM

Abstract

A method for providing multiple and definable current sources to a plating cathode and n-deflectors from a single current source. Problems solved by this invention include: 1. A plating system can be built with less power supplies and less channels.