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Corrosion Free Cleaning Solution for GMR Head During Aqueous Fabrication Process

IP.com Disclosure Number: IPCOM000014534D
Original Publication Date: 2000-Dec-01
Included in the Prior Art Database: 2003-Jun-19

Publishing Venue

IBM

Abstract

GMR sensor corrosion during FAB aqueous processing condition is a prevailing problem. The charts below show the effect of water and ionic solution on the dissolution of various GMR sensor materials including Co, NiMn and Cu. The charts below show the sheet resistance measurements as a function of soaking time in DI water and in 0.01M NaHCO3 solutions. Sheet resistance increase correlates roughly to loss of material, and it is thus a rough gauge of severity of corrosion. As can be seen from these charts, NiMn corrodes rapidly in NaHCO3 solution, while relatively stable in DI water. Co corrodes quickly in NaHCO3 and DI water environment. Cu is relatively stable in both environments. 0 00 50 100 150 200 Time, in Minutes 100A Co film on Glass